摘要 |
An interferometer has a diaphragm (11) between an interferometer divider (1) and a beam divider (2), and allows greater angular mobility of a measuring reflector (7) by means of a lens (15, 16) which images the diaphragm, one lens being located in each of the two outlets of the beam divider. A radiation-sensitive face of a photodetector (19,20) is used to detect each of the two diaphragm images (17,18). It can be preferably used for measurement tasks in which changes in the interference structure to be scanned occur during measurement. it allows optically contactless scanning of plane and any type of curved surfaces (7) as well as, for example, use in pressure measuring chambers in which the gas flowing into and out of the chamber causes turbulence in the interference structure. <IMAGE>
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