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发明名称
LOW STRIATION POSITIVE RESIST COMPOSITION
摘要
申请公布号
EP0126266(B1)
申请公布日期
1990.03.21
申请号
EP19840103982
申请日期
1984.04.10
申请人
HUELS AMERICA INC
发明人
LEWIS, JAMES MARVIN;OWENS, ROBERT AUSTIN;SWEENEY, RICHARD FRANCIS;WAKE, RONALD WARREN;RINEHART, ROBERT EUGENE
分类号
G03C1/72;C08L61/00;C08L61/04;G03F7/004;G03F7/022;H01L21/027
主分类号
G03C1/72
代理机构
代理人
主权项
地址
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