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发明名称
MANUFACTURE OF THIN FILM
摘要
申请公布号
JPH0280553(A)
申请公布日期
1990.03.20
申请号
JP19880233194
申请日期
1988.09.16
申请人
SHIMADZU CORP
发明人
OTANI FUMIHIKO;SHINOHARA MAKOTO
分类号
C23C14/02;C23C14/06;C23C14/32
主分类号
C23C14/02
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代理人
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