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发明名称
METHOD AND DEVICE FOR MOLECULAR RAY EPITAXIAL GROWTH
摘要
申请公布号
JPH0280394(A)
申请公布日期
1990.03.20
申请号
JP19880230347
申请日期
1988.09.13
申请人
NEC CORP
发明人
FURUHATA NAOKI
分类号
C01B3/00;C30B23/08;H01L21/203;H01L21/205
主分类号
C01B3/00
代理机构
代理人
主权项
地址
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