| 摘要 |
PURPOSE:To irradiate the desired position with a laser beam without executing fine adjustment of laser beam direction changeover elements by compensating a laser beam irradiation error caused by a fitting error of the beam direction changeover elements in hollow movable arms connected in order on movable parts by correcting the working quantities of the movable parts. CONSTITUTION:While the proceeding direction of the laser beam LB of a beam of light or charged particle beam supplied to the inside of a hollow movable arm mechanism from a prescribed part of the hollow movable arm mechanism in which the plural hollow arms AM1-AM5 are connected in order by the prescribed number of movable parts 1-5 being changed over in order by the prescribed number of beam direction changeover elements m1-m9 fitted to the inside of the hollow movable arm mechanism, the laser beam LB is taken out from the tip arm AM5 as the irradiating laser beam LB and irradiates a desired objective material. At this time, although the irradiation error takes place on the irradiating laser beam LB by an influence of the fitting error of the laser beam direction changeover elements m1-m9, the above- mentioned irradiated error can be compensated by correcting the working quantities of the movable parts 1-5. |
