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发明名称
THIN FILM FORMATION
摘要
申请公布号
JPH0277120(A)
申请公布日期
1990.03.16
申请号
JP19880310323
申请日期
1988.12.07
申请人
MITSUBISHI ELECTRIC CORP
发明人
TANAKA KAZUHIRO
分类号
H01L21/302;H01L21/28;H01L21/283;H01L21/3065;H01L21/3205;H01L21/3213
主分类号
H01L21/302
代理机构
代理人
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