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发明名称
METHOD OF CONTACT LAYER FORMATION BY MEANS OF CONTROLLED PLASMOREACTIVE DEPOSITION
摘要
申请公布号
CS8710245(A1)
申请公布日期
1990.03.14
申请号
CS19870010245
申请日期
1987.12.30
申请人
LIBRA MARTIN ING.,CS;BARDOS LADISLAV ING. CSC.,CS
发明人
LIBRA MARTIN ING.,CS;BARDOS LADISLAV ING. CSC.,CS
分类号
H01L21/203;H01L21/28;(IPC1-7):H01L21/28
主分类号
H01L21/203
代理机构
代理人
主权项
地址
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