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经营范围
发明名称
INSPECTING DEVICE
摘要
申请公布号
JPH0274050(A)
申请公布日期
1990.03.14
申请号
JP19880227224
申请日期
1988.09.09
申请人
TOKYO ELECTRON LTD
发明人
NAGASAKA MUNETOSHI
分类号
G01R31/28;G01R31/00;G01R31/26;H01L21/66
主分类号
G01R31/28
代理机构
代理人
主权项
地址
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