| 摘要 |
<p>PURPOSE:To omit the balancing of a photosensor in a triaxial force sensor by using a semiconductor optical-position detector as a detecting part which detects the incident position of a light beam. CONSTITUTION:A semiconductor optical-position detector 9 and a LED 2 are arranged in a squarely facing pattern. The semiconductor optical-position detector 9 is an element which can detect which point on a two-dimensional plane the light (a) is inputted. When the LED 2 emits the light at constant intensity all the time, measurement can be performed at the incident positions of the light to the semiconductor optical-position detector 9 in the directions (x) and (y), and the measurement can be performed with respect to the direction (z) at the intensity of the light which is inputted into the optical position detector 9. In this triaxial force sensor, the relative positions of the LED 2 and the semiconductor optical position detector 9 are changed in correspondence with the forces in the directions of (x), (y) and (z). Then, the three-dimensional forces can be measured based on the output of one semiconductor optical position detector 9.</p> |
