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发明名称	IC TESTING APPARATUS
摘要
申请公布号	JPH0274879(A)	申请公布日期	1990.03.14
申请号	JP19880224762	申请日期	1988.09.09
申请人	HITACHI ELECTRON ENG CO LTD	发明人	IWAGAMI KOYO
分类号	G01R31/28;H01L21/66	主分类号	G01R31/28
代理机构		代理人
主权项
地址

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