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发明名称
ION IMPLANTING DEVICE
摘要
申请公布号
JPH0275139(A)
申请公布日期
1990.03.14
申请号
JP19880226269
申请日期
1988.09.09
申请人
OKI ELECTRIC IND CO LTD
发明人
YAMAGUCHI KAZUO
分类号
H01J37/08;H01J37/317;H01K7/00;H01L21/265
主分类号
H01J37/08
代理机构
代理人
主权项
地址
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