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发明名称
DEVICE FOR FORMING SUPERFINE-PARTICLE FILM
摘要
申请公布号
JPH0273958(A)
申请公布日期
1990.03.13
申请号
JP19880224501
申请日期
1988.09.09
申请人
STANLEY ELECTRIC CO LTD;RES DEV CORP OF JAPAN
发明人
OKADA SATOSHI;TSUKADA KATSURA;OGURA KAZUHITO;TOYOTAMA HIDEKI
分类号
C23C14/24
主分类号
C23C14/24
代理机构
代理人
主权项
地址
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