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经营范围
发明名称
ION IMPLANTING APPARATUS
摘要
申请公布号
JPH0273626(A)
申请公布日期
1990.03.13
申请号
JP19880224926
申请日期
1988.09.08
申请人
NEC CORP
发明人
YAMAKAWA HIROSHI
分类号
C23C14/48;H01J3/34;H01J37/141;H01L21/265
主分类号
C23C14/48
代理机构
代理人
主权项
地址
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