| 摘要 |
PURPOSE:To clean the air in a sealed cage body by installing a filter for removing dust contained in the air in a radiator unit which cools and circulates air in the sealed cage. CONSTITUTION:In a discharge excitation type gas laser device, a sealed cage 1 includes a high frequency power source 2 for laser excitation, a resonator 3, and a radiator unit 7. Also, a Roots blower 4 circulates laser gas in a discharge tube through coolers 5a and 5b. And the coolers 5a is used to cool the laser gas that become high temperature by laser oscillation, and the cooler 5b is used to remove the compression heat by the Roots blower 4. Also, when the operation of the laser device is started, the unit 7 sucks the air of high temperature inside the cage 1, and after removing dust with a filter 373 and cooling the air with a heat exchanger 72, it blows the air against the discharge tube of the resonator 3 so as to cool the discharge tube. The blown air is sucked again by the unit after circulating the inside of the cage body 1. |
