PLASMA TREATMENT DEVICE,申请号JP19880224121-传众专利搜索

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发明名称	PLASMA TREATMENT DEVICE
摘要
申请公布号	JPH0272620(A)	申请公布日期	1990.03.12
申请号	JP19880224121	申请日期	1988.09.07
申请人	ANELVA CORP	发明人	NOGAMI YUTAKA
分类号	H05H1/30;H01L21/027;H01L21/205;H01L21/30;H01L21/302;H01L21/3065	主分类号	H05H1/30
代理机构		代理人
主权项
地址

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