| 发明名称 |
ELLIPSOMETER. |
| 摘要 |
Light from a light source is applied to a specimen after polarization, and the emergent light from the specimen is measured by an analyzer and a detector, the light to be measured passing through a spectroscope disposed in the optical path between the light source and the detector. |
| 申请公布号 |
DE3481220(D1) |
申请公布日期 |
1990.03.08 |
| 申请号 |
DE19843481220 |
申请日期 |
1984.06.07 |
| 申请人 |
UNIV TOHOKU |
发明人 |
YAMAMOTO, MASAKI, TAGAJYO CITY MIYAGI PREF., JP |
| 分类号 |
G01J4/04;G01J4/00;G01N21/21;(IPC1-7):G01N21/21;G01B11/06 |
主分类号 |
G01J4/04 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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