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发明名称
MASTER SLICE SYSTEM SEMICONDUCTOR INTEGRATED CIRCUIT
摘要
申请公布号
JPH0268951(A)
申请公布日期
1990.03.08
申请号
JP19880220765
申请日期
1988.09.03
申请人
NEC CORP
发明人
HATANO TSUTOMU
分类号
H01L21/822;H01L21/82;H01L27/04;H01L27/118
主分类号
H01L21/822
代理机构
代理人
主权项
地址
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