SPHERICAL MIRROR ANALYZER OF ENERGY OF CHARGED PARTICLE BEAM

摘要

PURPOSE: To secure the accurate angular convergence of charged particle beams under a constant dispersion and wide-width hole condition and a large scanning area on a tested surface by positioning a charged particle beam source and a detector having required shapes to prescribed positions symmetrically to each other with respect to the centers of concentric spherical electrodes. CONSTITUTION: A charged particle beam source 4 having the same shape of segment as that of an inner electrode 1 having a spherical shape concentric to a spherical outer electrode 3 and provided with a window 2 is provided on the inside of the electrode 1 and detecting means having the same shape as that of a power source 4 is provided symmetrically to the power source 4 with respect to the centers 0 of the electrodes 1 and 2. Secondary charged particle beams from point sources 1-c which are excited from an excited radiation generator 7 and outputted from the power source 4 respectively converge to the points a'-c' of a detector 5, because the beams of a gradient corresponding to the amount of delay of the potential applied across the electrodes 1 and 3 pass through the window. Therefore, the accurate angular convergence of the beams under a constant dispersion and wide-width hole condition and a large scanning area on a tested surface can be secured.