DRY TYPE THIN FILM PROCESSING DEVICE,申请号JP19880221541-传众专利搜索

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发明名称	DRY TYPE THIN FILM PROCESSING DEVICE
摘要
申请公布号	JPH0270065(A)	申请公布日期	1990.03.08
申请号	JP19880221541	申请日期	1988.09.05
申请人	FUJI ELECTRIC CO LTD	发明人	NAGAO YASUAKI
分类号	C23C16/50;C23C16/511;C23F4/00;H01L21/205;H01L21/302;H01L21/3065;H01L21/31	主分类号	C23C16/50
代理机构		代理人
主权项
地址

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