| 摘要 |
PURPOSE:To read a picture of high contrast which accurately shows the pattern of a master film substrate by providing a table, which supports the master substrate, with a transparent electrode which elecrostatically attracts the master substrate and a light source for transmission illumination under this transparent electrode. CONSTITUTION:A table 3 to support a master substrate 1 is provided with a transparent electrode 2 which electrostatically attracts the master substrate 1 and a light source 5 for transmission illumination under the transparent electrode 2. Consequently, the light transmittance of the transparent electrode which electrostatically attracts the master substrate is uniform. Transmission illumination is given by the light source under the transparent electrode. Thus, the picture of high contrast which shows the pattern of the master substrate is read. |
