PHYSICAL VAPOR DEPOSITION DUAL COATING APPARATUS AND PROCESS

摘要

A machine for covering a substrate (Fig. 14, 540) by means of both cathodic are plasma deposition (CAPD) (Fig. 2) and magnetron sputtering (Fig. 1) without breaking vacuum in a single chamber (Fig. 14, 421). A computer system monitors (Fig. 3, 403, 405) and controls all coating process parameters to coat in any sequence multiple thin film layers using either the CAPD or magnetron sputtering process. A rotating substrate table (Fig. 14, 470) used in conjunction with internal and external targets coats both sides of the substrate simultaneously.