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发明名称
METHOD FOR CONTROLLING ETCHING DEPTH
摘要
申请公布号
JPH0270079(A)
申请公布日期
1990.03.08
申请号
JP19880220384
申请日期
1988.09.05
申请人
CANON INC
发明人
KAMITAKAHARA HIROFUMI;KUWABARA TETSUO
分类号
C23F4/00
主分类号
C23F4/00
代理机构
代理人
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地址
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