| 摘要 |
PURPOSE:To make it excellent in space resolution by seeking the position and shape of charged particle beams based on the current flow in each position being amplified. CONSTITUTION:A semiconductor position detector 8, being arranged in the direction that it crosses the direction of irradiation of beam B at right angles, detects emission intensity on a fluorescent screen 7 corresponding to the position of a picture element with light receiving elements 8a as picture elements so as to take it out as an output signal related to the emission intensity at each position. The output signal of this semiconductor position detector 8 is sent to a signal treatment circuit 9, and in this signal treatment circuit 9 the position and shape of the beam B is calculated based on the output signal. Since the electron flux E is magnified by an electrostatic lens 5, the measurement of the position and the shape of the beam B with a fine diameter also becomes possible, and it becomes excellent in space resolution.
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