| 摘要 |
PURPOSE:To facilitate the attachment and detachment of a mask and to improve operability, by setting sample substrates on a substrate holder, and setting the mask, with tapered pins, which are formed as a unitary body with the substrate holder, as guides. CONSTITUTION:A pattern of a transparent electrode 42 is formed on the glass substrate 41, a part of the transparent electrode pattern is masked, and an amorphous silicon layer is formed. In setting the sample substrates and the mask when the amorphous silicon film is formed, the substrate holder 51, the sample substrates 52, the mask 53, and the tapered pins 54 are used. The mask of stainless steel, which has the thickness of 0.1-0.3mm., is usually used. Materials such as phosphor bronze, nickel, and molybdenum are used in correspondence with the purposes. The upper part of the tapered pin 54 is thin and the lower part thereof is thick. The lowest part for about 0.3-0.5mm. is formed in parallel. |
