摘要 |
<p>A pin electronics device (20) for an IC tester, (10) in which there are provided for each terminal of an IC under test (30) a channel including a driver (21) for applying a drive pulse to the terminal and a logical comparator (22) for determining and holding the logic of a response signal from the terminal, and a difference between the delay of the path from a common reference strobe pulse output terminal (41) to a strobe terminal (A) the logical comparator of each channel and the set-up time of the logical comparator is preset to be equal for all the channels. The drive pulse from the driver is determined in logic by the logical comparator at the timing of a reference strobe pulse, then the phase of the drive pulse is adjusted by a first variable delay element (25) so that the reference strobe pulse may coincide with an edge of the drive pulse, and the phase adjusted drive pulse is provided to the logical comparator. At the same time, a strobe signal is applied to the logical comparator and the phase of the strobe signal is adjusted by a second variable delay element (43) so that the edge of the drive pulse may coincide with the strobe signal.</p> |