| 摘要 |
PURPOSE:To measure a specimen having a minute volume as an object and to improve durability by providing a constitution wherein a metal oxide semiconductor is bonded to the gate electrode of a field effect transistor. CONSTITUTION:A pH sensor 1 is composed of the following parts: a three- terminal type field effect transistor 2 which is shielded with resin; a source terminal 3; a drain terminal 4; a gate terminal 5, an outer amplifier 8 for monitoring outputs; a waterproof body 7 which protects the main body of the field effect transistor; a leg part 9; and a minute probe 10. The entire surface of the probe 10 in contact with liquid to be detected is covered with a metal oxide semiconductor layer 11. The layer 11 is supported with a substrate material 12. The substrate material 12 is physically rigid and can be applied for coating of the metal oxide semiconductor layer by, e.g. a vacuum evaporation method and the like. As the substrate material, a chemically stable supporting material is selected. |
