APPLICATOR FOR PHOTORESIST,申请号JP19880219312-传众专利搜索

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发明名称	APPLICATOR FOR PHOTORESIST
摘要
申请公布号	JPH0266551(A)	申请公布日期	1990.03.06
申请号	JP19880219312	申请日期	1988.08.31
申请人	NEC CORP	发明人	YANAI MASAHARU
分类号	G03F7/16;B05C9/10;B05C11/08;H01L21/027;H01L21/30	主分类号	G03F7/16
代理机构		代理人
主权项
地址

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