| 摘要 |
PURPOSE: To prevent a gas containing bacteria from being supplied to a device chamber by testing the integrity of a filter in a built-in condition after sterilization, replacing the filter material when the filter is defective, and newly sterilizing the filter separately from a vacuum chamber. CONSTITUTION: In order to test the integrity of a sterilization filter 7 or a filter cartridge 12 of the sterilization filter in a built-in condition, a housing 11 is provided with a second connection parts 21 and 22, the connection part 21 is arranged at the top of the filter cartridge 12, and the connection part 22 is arranged at the bottom of the filter housing. The connection part 21 is connected to a pipe 22 with a valve 23, and the pipe 22 is connected to a compressed air source 29 through valves 28, and 61, or 62 which are present at pipes in parallel. The pipe 22 can be exhausted via a valve 33. When the filter cartridge 12 is determined to be defective resulting from a pressure retaining test, the filter cartridge 12 is replaced with a new one. After this replacement, heated vapour is introduced into the filter housing 11 and a vessel 43 through a pipe 18, and sterilization is performed. |
