| 摘要 |
<p>PURPOSE:To eliminate the separation and the cracks of bonding by providing recesses and projections for mounting and demounting the centers of respective circular end plates on both segments that are two halves of a cylinder. CONSTITUTION:Many holes are drilled in first and second semi-cylinder port segments 1a, 1b that are two halves of a cylinder to provide circular plate-like end plates 2a, 2b on both the ends thereof. Opening parts (recess part) 11 are provided on the center of the end plate 2a, and a projection part 12 for mounting and demounting the opening parts 11 is formed on the center of the end plate 2b. Rods 13 on which grooves 13a are cut at regular intervals are attached for fixing a semiconductor wafer on the inner face of a semi-cylinder part 3b. A cylindrical port is completed by cylindrically combining the port segments 1a, 1b and engaging the projection part 12 of the end plate 2b with the opening 11 of the end plate 2a.</p> |
