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发明名称
EPITAXIAL GROWTH OF SEMICONDUCTOR LAYER
摘要
申请公布号
JPH0265123(A)
申请公布日期
1990.03.05
申请号
JP19880216719
申请日期
1988.08.30
申请人
FUJITSU LTD
发明人
MIENO FUMITAKE
分类号
H01L21/205
主分类号
H01L21/205
代理机构
代理人
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地址
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