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发明名称
SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH0265179(A)
申请公布日期
1990.03.05
申请号
JP19880217131
申请日期
1988.08.30
申请人
MITSUBISHI ELECTRIC CORP
发明人
AKIYAMA HAJIME;MINATO TADAHARU
分类号
H01L29/68;H01L21/336;H01L21/66;H01L27/14;H01L29/78;H01L31/09
主分类号
H01L29/68
代理机构
代理人
主权项
地址
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