发明名称 MANUFACTURE OF SOLID-STATE IMAGE SENSING DEVICE
摘要 <p>PURPOSE:To provide a desired spectral sensitivity with a high resolution by forming a filter layer from a filter stock solution obtained by dissolving two out of three kinds of coloring element into a synthetic polymer solution, and processing the output of each photoelectric conversion element for color image formation. CONSTITUTION:Three kinds of filter stock solutions are prepared by dissolving three kinds of coloring elements emitting three primary colors independently into a synthetic polymer solution. These three kinds of solution are applied to the surface of a silicon substrate 10 having an array of photoelectric conversion elements 1 formed thereon one by one, and patterned to form a red filter layer 5, a green filter layer 6, and a blue filter layer 7. Among the respective filter layers is a resist printing layer 4 composed of an acid of silicate glass formed by e.g., spin coating. Accordingly, the filter layers 5 to 7 having a predetermined spectral transmittance are formed on each photoelectric conversion element. As a result, a desired spectral sensitivity can be obtained with a high resolution.</p>
申请公布号 JPH0265173(A) 申请公布日期 1990.03.05
申请号 JP19880216721 申请日期 1988.08.30
申请人 FUJITSU LTD 发明人 MORISHIGE AKIRA
分类号 G02B5/20;H01L27/14 主分类号 G02B5/20
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