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发明名称
UNIFORMLY HEATING DEVICE FOR LENGTHY SUBSTRATE
摘要
申请公布号
JPH0265089(A)
申请公布日期
1990.03.05
申请号
JP19880213781
申请日期
1988.08.30
申请人
ULVAC CORP;KAWASAKI STEEL CORP
发明人
HAYASHI NOBUHIRO;OKUBO HIROSHI;IGUCHI MASAO
分类号
H05B7/00
主分类号
H05B7/00
代理机构
代理人
主权项
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