| 摘要 |
PURPOSE:To improve with high accuracy by having operational rate calculating means, an initial matrix calculating unit, and an operational rate calculating part calculating by non-interactive control algorithm. CONSTITUTION:An actual film thickness is observed at each zone of a lip part 4 by means of profile sensor 24, and outputted to a storage unit 30. This film thickness observed value is outputted to a deviation calculating unit 32 together with a film thickness target value accommodated in a storage unit 25 adjusting timing at each zone of the lip part 4. The calculating unit 32 obtains a deviation from observation value and target value, and output to a calculating unit 33. Simultaneously, resin flow rate characteristic value is outputted from a storage unit 26 to the calculating unit 33. The calculating unit 33 calculates a target displacement vector (DELTAy). A calculating unit 35 receives (DELTAy) as a reference input value, and inputs the backward matrix (Ka.Kp)<-1> accommodated in a storage unit 27 adjusting timing at each zone of the lip part 4, and further, calculating an initial voltage vector (DELTAu) in non-interactive input, and outputs it to an outputting unit 36. |
