| 摘要 |
PURPOSE:To let a cleaning liquid remain in a groove formed at an outer periphery face of a substrate for exposure use and to prevent the surface of the substrate for exposure use from being influenced adversely by a method wherein the groove is formed at the outer periphery face of the substrate for exposure use by a simple and easy working operation. CONSTITUTION:A groove 1a is formed at an outer periphery face 1b of a substrate 1 for exposure use. A holder 2a of a cleaning jig 2 is coupled to the groove 1a formed at the outer periphery face 1b of the substrate 1 for exposure use; the substrate 1 for exposure use is held for a cleaning operation. |
