发明名称 Method of manufacturing a thin oxide layer by a dry process on a III-V material, oxide layer obtained by this method and application to a Schottky diode
摘要 This method consists a in preparing the surface of the substrate 4 to be placed in contact with the oxide layer 10 with a view to eliminating therefrom any trace of natural oxide which may be present, b in oxidising the prepared surface by ultraviolet irradiation in an oxygen atmosphere. It makes it possible to obtain an oxide layer 8 from 3 to 5 nm thick forming part of the construction of a Schottky diode 4, 10 formed on a semi-insulating InP substrate 2. <IMAGE>
申请公布号 FR2635915(A1) 申请公布日期 1990.03.02
申请号 FR19880011371 申请日期 1988.08.30
申请人 LOUALICHE SLIMANE 发明人
分类号 H01L21/285;H01L21/316;H01L29/47;H01L29/872 主分类号 H01L21/285
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