| 摘要 |
PURPOSE:To facilitate the adjustment of the discharge quantity by carrying out the suction and discharge of liquid by operating a bellows which is expandable and is housed into a pump body, in reciprocation by a reciprocating means and adjusting the top dead center position of the reciprocating means. CONSTITUTION:When the liquid such as resisting liquid applied onto a semiconductor wafer is discharged, the piston 72 of an air cylinder 70 is moved rightward by the air drive, and a bellows 54 is compressed to a closely attached state. While, the capacity of a pump working chamber 56 is increased at this time, and liquid is sucked into the working chamber 56 from a suction inlet 60 through a check valve 58. Then, the drive direction of the air cylinder 70 is selected to move the piston 72 leftward, and the bellows 54 is extended. While, the capacity of the working chamber 56 is reduced, and the liquid is discharged from a discharge port 62. In this case, the stroke of the piston 72 is adjusted by turning-operating an adjusting screw 76, and the discharge quantity is adjusted. |
