PATTERN FOR SIZE MEASUREMENT,申请号JP19880213102-传众专利搜索

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发明名称	PATTERN FOR SIZE MEASUREMENT
摘要
申请公布号	JPH0262043(A)	申请公布日期	1990.03.01
申请号	JP19880213102	申请日期	1988.08.26
申请人	NEC CORP	发明人	ONODERA KIYOO
分类号	H01L21/302;H01L21/306;H01L21/3205;H01L23/52	主分类号	H01L21/302
代理机构		代理人
主权项
地址

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