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发明名称
INSPECTION APPARATUS
摘要
申请公布号
JPH0261506(A)
申请公布日期
1990.03.01
申请号
JP19880212390
申请日期
1988.08.29
申请人
TOSHIBA CORP
发明人
SEKIGUCHI SHINGO;ITO MITSUTAKA
分类号
G01B11/02;G01B11/24;G01B11/26
主分类号
G01B11/02
代理机构
代理人
主权项
地址
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