| 摘要 |
PURPOSE:To provide a polymeric material which is excellent in moldability and gives and molding excellent in an antistatic property, strengths, etc., by mixing a tetrafluoroethylene/fluoro(alkyl vinyl ether) copolymer of a specified composition and a conductive substance. CONSTITUTION:This antistatic polymeric material is produced by mixing a tetrafluoroethylene/fluoro(alkyl vinyl ether) copolymer containing at least 4wt.% fluoro(alkyl vinyl ether) group [e.g., tetrafluoroethylene/perfluoro(methyl vinyl ether) copolymer] with a conductive substance (e.g., acetylene black). The amount of the conductive substance added is suitably in a range of 1-15wt.%. A suitable copolymer is one having a melt index in the range of 2-50g/10min. The obtained antistatic polymeric material can be desirably used for, e.g., a fixture for holding a semiconductor substrate. |
