| 摘要 |
<p>PURPOSE:To obtain a metal thin film resistor whose cost is low and whose productivity is excellent by a method wherein a compound layer containing a metal is formed on a substrate and a metal oxide obtained by pyrolysis is heat-treated in a reducing atmosphere. CONSTITUTION:A compound layer containing a metal is formed on a substrate; the compound layer containing the metal is pyrolyzed in an oxidizing atmosphere; a metal oxide is formed. After that, it is heat-treated in a reducing atmosphere. As a compound containing the metal, various alkoxides, various carboxylic acid salts, various organic compound complexes, various organic compounds such as metallocene or the like, or various inorganic compounds such as a nitrate, a sulfate or the like can be enumerated. Thereby, it is possible to easily obtain a metal thin film resistor by using a printing apparatus and a simple apparatus of an atmospheric furnace.</p> |
