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发明名称
PARTICLE BEAM DIAMETER MEASUREMENT DEVICE
摘要
申请公布号
JPH0260038(A)
申请公布日期
1990.02.28
申请号
JP19880208321
申请日期
1988.08.24
申请人
HITACHI LTD
发明人
YAMAMOTO KENICHI;KURODA KATSUHIRO
分类号
H01J37/04;H01J37/09;H01J37/28
主分类号
H01J37/04
代理机构
代理人
主权项
地址
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