| 摘要 |
PURPOSE:To stabilize an apparatus and to make its output efficiency higher by fixing a first piezoelectric element to a base and a vibrator and then by fixing second - third piezoelectric elements thereto. CONSTITUTION:In a piezoelectric actuator, a first piezoelectric element 1 is fixed to a base 4 and a vibrator 5, and second and third piezoelectric elements 2 and 3 are also fixed to said base 4 and vibrator 5 and arranged at right angles to the first piezoelectric element 1. Said second, third piezoelectric elements 2, 3 are arranged in a straight line and in parallel with a mover 6. Then, the mover 6 is brought into pressure contact with said vibrator 5 and respective piezoelectric elements 1-3 are driven so that said vibrator 5 is vibrated while describing a slanting locus, etc. As a result, said mover 6 moves on the vibrator 5. |
