| 摘要 |
PURPOSE:To accurately detect the errors in lamination of underneath patterns and upper layer patterns with high accuracy by a method wherein multiple marks for evaluating the accuracy of superposition are automatically measured to calculate the measured signals by linear regression. CONSTITUTION:When underneath patterns 2 are formed and then upper layer patterns 3 are to be formed, the underneath patterns 2 and the upper layer patterns 3 are previously cut out at different pitches. The mutual positions of both patterns 2, 3 are successively shifted at respective unit patterns I-VII of both patterns 2, 3 to measure the shifted amounts as the signals of reflected ray by scanning the ray, etc., and then the measured values are calculated by linear regression. Finally, the errors in superposition of the patterns 2, 3 hardly affected by any deformation, etc., in the pattern shape can be detected with high accuracy by reading the values calculated by the linear regression as for the zero pattern in the design value. |
