| 摘要 |
PURPOSE:To achieve a high-speed movement and a high-speed response by driving the piezoelectric member of moving units while driving said members of clamping units to cause said members to perform clamping. CONSTITUTION:A drive for an inching system is composed of a set of moving units 12 and two sets of clamping units 13, 14 positioned on both sides in the direction of movement between a pair of opposed sliding rails. Said both units 12-14 are composed of a combination of piezoelectric members 15-17 by means of laminated piezoelectric elements all distortion-displaced in the direction of lamination by application of voltage and displacement scaling-up mechanisms 18-20 for said members. In said displacement scaling-up mechanism 19, e.g., the piezoelectric member 16 is fixed by adhesion between displaced sides 23-24. Then, the piezoelectric member 15 of said moving units 12 is driven to move, while the piezoelectric members 16-17 of said clamping units 13-14 are driven to perform clamping. As a result, a stable scaled-up displacement is obtained and a sure clamping state can be secured. |
