| 摘要 |
PURPOSE:To prevent cracks from occurring in a substrate by a method wherein the ceramic substrate is fixed by a frame provided with a peak and a clamp through the intermediary of spacers. CONSTITUTION:A ceramic substrate 2 is placed on a frame 5 through the intermediary of a first spacer 4, a second spacer 6 is placed on thereon, and the substrate 2 and the frame 5 are fixed to each other through a screw 8. Then, the clamp 7 presses the second spacer 6, the substrate 2, and the first spacer 4 against the frame 5, and a section A of the first spacer 4 serves as a stopper in a lateral direction to fix the substrate 2, and the first and the second spacers 4 and 6 are formed of resin which is easy to deform, so that the warpage of the frame 5 and the substrate 2 and the stress of press caused by the clamp 7 and the screw 8 can be absorbed by these spacers and consequently cracks can be prevented from occurring in the substrate 2.
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