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发明名称
CRYOPUMP WITH EXHAUST FILTER
摘要
申请公布号
EP0232325(B1)
申请公布日期
1990.02.28
申请号
EP19860904687
申请日期
1986.07.16
申请人
HELIX TECHNOLOGY CORPORATION
发明人
EACOBACCI, MICHAEL, J.;PLANCHARD, DAVID, C.
分类号
F04B37/08
主分类号
F04B37/08
代理机构
代理人
主权项
地址
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