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发明名称
VERFAHREN ZUM POLIEREN VON HALBLEITERSCHEIBEN
摘要
申请公布号
DD276565(A1)
申请公布日期
1990.02.28
申请号
DD19880321023
申请日期
1988.10.24
申请人
VEB SPURENMETALLE FREIBERG,DD
发明人
GEIL,WERNER,DD;HOFFMANN,KLAUS,DD;LANGE,WOLFRAM,DD;SCHMUGGE,KLAUS,DD;STIEHLER,FRITZ,DD;WEBER,KLAUS,DD;KESSLER,HAGEN,DD;ZEUN,KARL-HEINZ,DD;BOCK,KLAUS-PETER,DD;HEIDE,GISELA,DD
分类号
H01L21/302;(IPC1-7):H01L21/302
主分类号
H01L21/302
代理机构
代理人
主权项
地址
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