| 摘要 |
PURPOSE:To improve the rigidity of a diaphragm by combining the physical property of the base body and a layered body without using any complicated devices, by using a metal or a synthetic resin for the base body and by forming the layered body with SiO2on the surface of the base body. CONSTITUTION:A metal or a synthetic resin is formed to the prescribed shape of a diaphragm to be manufactured, and the surface of the diaphragm substrate is cleaned and impurities, such as oxides, fat, etc., are removed from the surface. Then, an alcoholic solution of alkoxy-substituted organosilane compound (Si(OR); where R is alkyl group) is applied on the cleaned surface, and the alkoxy- substituted organosilane compound is gelled and heated and an SiO2 film is formed on the surface of the substrate. Then the physical property of the diaphragm substrate and the film is combined without any complicated devices and the rigidity of the diaphragm is improved. |
