ALUMINUM NITRIDE SINTERED BODY

摘要

PURPOSE:To remarkably improve the surface smoothness of an aluminum nitride sintered body by vapor-depositing aluminum nitride on the surface of the sintered body. CONSTITUTION:An aluminum nitride (AlN) layer is formed on the surface of an AlN sintered body by vapor deposition. The sintered body preferably has >=3.15g/cc bulk density and <=1mum surface roughness. Restrictions are not especially placed on the method for vapor-depositing AlN and a generally adopted method such as CVD(chemical vapor deposition) or PVD(physical vapor deposition) may be utilized.